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Proceedings Paper

Characteristics of amplitude modulation cantilever sensor with optical waveguide in liquid
Author(s): Kyung Woon Lee; Jinsik Kim; Dong-ho Lee; Myung-Sic Chae; Kyo Seon Hwang; Jung Ho Park
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Paper Abstract

We present the basic characteristics of amplitude modulation cantilever with optical waveguide in liquid. This optical waveguide cantilever-based transducer can be used for small particle detection or biological sensing in liquid environments. Essentially, the SiON waveguide embedded in the SiO2 cantilever is designed and fabricated to detect the biomolecular interaction or small particle in the liquid. For a measurement, the actuation based on amplitude modulation is applied for a stable oscillation of the cantilever in liquid environment. Finally, modulated output signal of optical waveguide cantilever were measured and analyzed.

Paper Details

Date Published: 20 February 2017
PDF: 7 pages
Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160P (20 February 2017); doi: 10.1117/12.2251817
Show Author Affiliations
Kyung Woon Lee, Korea Univ. (Korea, Republic of)
Jinsik Kim, Korea Institute of Industrial Technology (Korea, Republic of)
Dong-ho Lee, Korea Univ. (Korea, Republic of)
Myung-Sic Chae, Korea Institute of Science and Technology (Korea, Republic of)
Kyo Seon Hwang, Korea Institute of Science and Technology (Korea, Republic of)
Jung Ho Park, Korea Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 10116:
MOEMS and Miniaturized Systems XVI
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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