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Development of a scanner-based direct laser interference patterning optical head: new surface structuring opportunities
Author(s): Tim Kunze; Christoph Zwahr; Benjamin Krupop; Sabri Alamri; Florian Rößler; Andrés Fabián Lasagni
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Paper Abstract

Periodic surface structures with micrometer or submicrometer resolution produced on surfaces of different technological parts can be used to improve their mechanical, biological or optical characteristics. While direct laser interference patterning (DLIP) already permits structuring speeds of up to 0.9 m2/min under constant process parameters, fabrication of individualized surface structures fabricated "on-the-fly" is not possible at high speeds. In this study, a scanner-based DLIP optical head is presented which combines the flexibility of the DLIP technology with a high-performance galvanometer scanner system. An evaluation of the structuring results as well as various application examples will be presented.

Paper Details

Date Published: 17 February 2017
PDF: 7 pages
Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009214 (17 February 2017); doi: 10.1117/12.2251745
Show Author Affiliations
Tim Kunze, Fraunhofer Institute for Material and Beam Technology (Germany)
Christoph Zwahr, Fraunhofer Institute for Material and Beam Technology (Germany)
TU Dresden (Germany)
Benjamin Krupop, TU Dresden (Germany)
Sabri Alamri, Fraunhofer Institute for Material and Beam Technology (Germany)
Florian Rößler, TU Dresden (Germany)
Andrés Fabián Lasagni, Fraunhofer Institute for Material and Beam Technology (Germany)
TU Dresden (Germany)


Published in SPIE Proceedings Vol. 10092:
Laser-based Micro- and Nanoprocessing XI
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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