Nanomembranes are thin, transferable and can be shaped into almost arbitrary geometries. We embed high quality quantum emitters into III-V semiconductor nanomembranes and transfer them onto piezoelectric substrate actuators. By applying external piezoelectric stress, the quantum properties of single photon emitters can be accurately tuned and major steps towards a viable quantum communication technology have been reached. We also strain engineer thin SiOx based nanomembranes and shape them into fully integratable microtubular microcavities. These novel microarchitectures show photonic spin-orbit coupling, controlled coupling of surface plasmons to optical resonator modes as well as a high compatibility to new 3D integration schemes.

Date Published: 15 August 2017
PDF: 1 pages
Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 1011506 (15 August 2017); doi: 10.1117/12.2251383

Published in SPIE Proceedings Vol. 10115:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf, Editor(s)