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Environmental mid-infrared gas sensing using MEMS FTIR spectrometer
Author(s): Mazen Erfan; Ahmed A. Elsayed; Yasser M. Sabry; Bassem Mortada; Khaled Sharaf; Diaa Khalil
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Paper Abstract

In this work, we report carbon dioxide gas sensing in the ambient air in the mid-infrared range around 4250 nm using MEMS FTIR spectrometer. The core engine of the spectrometer is a scanning Michelson interferometer fabricated using deep etching technology on silicon-on-insulator wafer. The measured Signal-to-Noise Ratio (SNR) is 24 dB at a wavelength of 4250 nm and the spectral resolution is about 60 cm-1. A free-space gas cell using CaF2 lenses with lightgas interaction lengths of 12 cm and 120 cm is demonstrated. The results demonstrate about 400 ppm concentration detection in the ambient air. The theoretical sensitivity limit based on the achieved SNR and resolution is about 15 ppm.

Paper Details

Date Published: 20 February 2017
PDF: 6 pages
Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160L (20 February 2017); doi: 10.1117/12.2251345
Show Author Affiliations
Mazen Erfan, Ain Shams Univ. (Egypt)
Ahmed A. Elsayed, Ain Shams Univ. (Egypt)
Yasser M. Sabry, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Bassem Mortada, Ain-Shams Univ. (Egypt)
Si-Ware Systems (Egypt)
Khaled Sharaf, Ain Shams Univ. (Egypt)
Diaa Khalil, Ain Shams Univ. (Egypt)
Si-Ware Systems (Egypt)


Published in SPIE Proceedings Vol. 10116:
MOEMS and Miniaturized Systems XVI
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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