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Proceedings Paper

Study of TLIPSS formation on different metals and alloys and their selective etching
Author(s): Alexandr V. Dostovalov; Victor P. Korolkov; Vadim S. Terentiev; Konstantin A. Okotrub; Fedor N. Dultsev; Anton Nemykin; Sergey A. Babin
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Paper Abstract

Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

Paper Details

Date Published: 17 February 2017
PDF: 9 pages
Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921H (17 February 2017); doi: 10.1117/12.2251341
Show Author Affiliations
Alexandr V. Dostovalov, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
Victor P. Korolkov, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)
Vadim S. Terentiev, Institute of Automation and Electrometry (Russian Federation)
Konstantin A. Okotrub, Institute of Automation and Electrometry (Russian Federation)
Fedor N. Dultsev, Institute of Semiconductor Physics (Russian Federation)
Anton Nemykin, Institute of Automation and Electrometry (Russian Federation)
Sergey A. Babin, Institute of Automation and Electrometry (Russian Federation)
Novosibirsk State Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 10092:
Laser-based Micro- and Nanoprocessing XI
Udo Klotzbach; Kunihiko Washio; Rainer Kling, Editor(s)

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