Share Email Print

Proceedings Paper

Compact optical MEMS accelerometers and temperature sensors
Author(s): Branislav Timotijevic; Yves Petremand; Dara Bayat; Markus Luetzelschwab; Laurent Aebi; Maurizio Tormen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, metalfree sensors for such systems has gained a lot of attention due to the fact that they are resistant to typically very strong electromagnetic fields and that they are non-conductive. We present miniature temperature and accelerometer optical sensors using a common silicon MEMS platform. A linear response with a deviation as small as 1% between set and measured accelerations has been obtained in an acceleration range 0-40g. Preliminary tests for temperature sensors indicate a linear response with sensitivity better than 1°C in a range of 20°C to 150°C.

Paper Details

Date Published: 20 February 2017
PDF: 8 pages
Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160G (20 February 2017); doi: 10.1117/12.2250345
Show Author Affiliations
Branislav Timotijevic, CSEM (Switzerland)
Yves Petremand, CSEM (Switzerland)
Dara Bayat, CSEM (Switzerland)
Markus Luetzelschwab, CSEM (Switzerland)
Laurent Aebi, MC-Monitoring (Switzerland)
Maurizio Tormen, CSEM (Switzerland)

Published in SPIE Proceedings Vol. 10116:
MOEMS and Miniaturized Systems XVI
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

© SPIE. Terms of Use
Back to Top