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Proceedings Paper

Broadband mirror for soft x-ray optics
Author(s): Pavel E. Kondrashov; Igor S. Smirnov; Helena Novoselova; Alexander M. Baranov; V. V. Sleptsov
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Paper Abstract

Multilayer interference structures (MIS) consisting of alternating diamond-like layers with different parameters were investigated. The structures with periods from 68 Angstrom up to 21 angstrom were obtained by ion-plasma methods. Properties of diamond-like MIS and diamond-like films were studied by x-ray diffraction measurements in the range 1.54 angstrom - 11.8 angstrom and ESCA. The numerical computations of reflecting ability of multilayer diamond-like structures were carried out. The difference between experimental and theoretical results are discussed. It is shown experimentally the feasibility of creating wideband mirrors for the soft x-ray range using diamond-like layers with different electron densities.

Paper Details

Date Published: 16 October 1995
PDF: 7 pages
Proc. SPIE 2517, X-Ray and EUV/FUV Spectroscopy and Polarimetry, (16 October 1995); doi: 10.1117/12.224930
Show Author Affiliations
Pavel E. Kondrashov, Institute of Electronics and Mathematics (Russia)
Igor S. Smirnov, Institute of Electronics and Mathematics (Russia)
Helena Novoselova, Institute of Electronics and Mathematics (Russia)
Alexander M. Baranov, Research Institute of Vacuum Technique (Russia)
V. V. Sleptsov, Research Institute of Vacuum Technique (Russia)


Published in SPIE Proceedings Vol. 2517:
X-Ray and EUV/FUV Spectroscopy and Polarimetry
Silvano Fineschi, Editor(s)

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