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Proceedings Paper

Super resolution nano-information recording in a new hydrazone metal complex material
Author(s): Kui Zhang; Jingsong Wei; Zhimin Chen; Tao Wei; Yongyou Geng; Yang Wang; Yiqun Wu
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Paper Abstract

Laser thermal lithography has been proposed for a few years, which has the advantages of breaking through the optical diffraction limit, operation in far-field and in air, and low production cost. In this paper, a new hydrazone metal complex is used as the laser thermal lithography material due to its feature of the one-step fabrication of micro/nano structure without mask and wet-etching process. Based on the laser thermal lithography method, super resolution nano-information pits are directly written on the surface of hydrazone metal complex thin films. Pits with a minimum feature size of about 79 nm are successfully obtained, which is only about 1/7 of the writing spot size. Moreover, the reactive ion etching method can be applied to transfer the pits onto a silica substrate. These results suggest the potential applications of the new material in high density optical data storage and semiconductor industries.

Paper Details

Date Published: 12 October 2016
PDF: 7 pages
Proc. SPIE 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 981810 (12 October 2016); doi: 10.1117/12.2248354
Show Author Affiliations
Kui Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Jingsong Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Zhimin Chen, Heilongjiang Univ. (China)
Tao Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Yongyou Geng, Shanghai Institute of Optics and Fine Mechanics (China)
Yang Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Yiqun Wu, Shanghai Institute of Optics and Fine Mechanics (China)
Heilongjiang Univ. (China)


Published in SPIE Proceedings Vol. 9818:
2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
Fuxi Gan; Zhitang Song; Yang Wang, Editor(s)

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