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Proceedings Paper

Latest results on solarization of optical glasses with pulsed laser radiation
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Paper Abstract

Femtosecond lasers are more and more used for material processing and lithography. Femtosecond laser help to generate three dimensional structures in photoresists without using masks in micro lithography. This technology is of growing importance for the field of backend lithography or advanced packaging. Optical glasses used for beam shaping and inspection tools need to withstand high laser pulse energies.

Femtosecond laser radiation in the near UV wavelength range generates solarization effects in optical glasses. In this paper results are shown of femtosecond laser solarization experiments on a broad range of optical glasses from SCHOTT. The measurements have been performed by the Laser Zentrum Hannover in Germany. The results and their impact are discussed in comparison to traditional HOK-4 and UVA-B solarization measurements of the same materials. The target is to provide material selection guidance to the optical designer of beam shaping lens systems.

Paper Details

Date Published: 22 February 2017
PDF: 11 pages
Proc. SPIE 10097, High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VI, 1009703 (22 February 2017); doi: 10.1117/12.2248317
Show Author Affiliations
Ralf Jedamzik, SCHOTT AG (Germany)
Uwe Petzold, SCHOTT AG (Germany)


Published in SPIE Proceedings Vol. 10097:
High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VI
Stefan Kaierle; Stefan W. Heinemann, Editor(s)

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