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Proceedings Paper

Measurement accuracy analysis for crystal plane spacing of nitride epitaxial layer by x-ray diffraction
Author(s): Jianjun Cui; Sitian Gao
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Paper Abstract

In order to realize high accuracy measurement of the physical dimension of unit cells in a crystal lattice, the measurement accuracy analysis for crystal plane spacing of nitride epitaxial layer is discussed. An angular analysis for X-ray diffractometer system is established and the measurement uncertainty from the experimental apparatus, measurement method are also analyzed. Experimental results indicate that the accuracy of the system’s angular can get U = ±0.01° (k=2) and the measuring accuracy of lattice plane spacing is within 0.01% of the d-spacing. These results represent an improvement in the existing measurement capabilities by more than an order of magnitude and make more numerous systematic effects visible and reproducible.

Paper Details

Date Published: 19 October 2016
PDF: 5 pages
Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101553P (19 October 2016); doi: 10.1117/12.2247433
Show Author Affiliations
Jianjun Cui, National Institute of Metrology (China)
Sitian Gao, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 10155:
Optical Measurement Technology and Instrumentation
Sen Han; JiuBin Tan, Editor(s)

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