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Proceedings Paper

High-rate chemical vapor deposition of diamond films by dc arc discharge in hydrogen-methane mixture gas
Author(s): Xiang-Liu Jiang; Fang-Qing Zhang; Jiang-Qi Li; Bin Yang; Guang-Hua Chen
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Paper Details

Date Published: 1 December 1990
PDF: 8 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22474
Show Author Affiliations
Xiang-Liu Jiang, Beijing Institute of Science and Technology (China)
Fang-Qing Zhang, Lanzhou Univ. (China)
Jiang-Qi Li, Lanzhou Univ. (China)
Bin Yang, Lanzhou Univ. (China)
Guang-Hua Chen, Lanzhou Univ. (China)

Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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