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Proceedings Paper

Diamond film polishing with argon and oxygen ion beams
Author(s): Tianji Zhao; Daniel F. Grogan; Bertrand G. Bovard; H. Angus Macleod
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Paper Details

Date Published: 1 December 1990
PDF: 10 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22473
Show Author Affiliations
Tianji Zhao, Optical Sciences Ctr./Univ. of (United States)
Daniel F. Grogan, Optical Sciences Ctr./Univ. of (United States)
Bertrand G. Bovard, Optical Sciences Ctr./Univ. of (United States)
H. Angus Macleod, Optical Sciences Ctr./Univ. of (United States)


Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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