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Proceedings Paper

Diamond membranes for x-ray lithography
Author(s): Charles R. Guarnieri; Jerome J. Cuomo; S. J. Whitehair; B. S. Berry; W. C. Pritchet; Raul E. Acosta; Alan D. Wilson
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Paper Details

Date Published: 1 December 1990
PDF: 5 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22471
Show Author Affiliations
Charles R. Guarnieri, IBM/Thomas J. Watson Research (United States)
Jerome J. Cuomo, IBM/Thomas J. Watson Research (United States)
S. J. Whitehair, IBM/Thomas J. Watson Research (United States)
B. S. Berry, IBM/Thomas J. Watson Research (United States)
W. C. Pritchet, IBM/Thomas J. Watson Research (United States)
Raul E. Acosta, IBM/Thomas J. Watson Research (United States)
Alan D. Wilson, IBM/Thomas J. Watson Research (United States)


Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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