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Proceedings Paper

Te-free environmental materials of TixSb2.19Se applied in phase change memory
Author(s): Yueqin Zhu; Sannian Song; Le Li; Huaqing Xie; Zhitang Song; Bo Liu; Junxing Wu
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Paper Abstract

Environmental friendly Te-free phase change material of TixSb2.19Se was investigated for PCM application. As the important thermal properties, the crystallization temperature (Tc) and data retention for ten years for the best selected composition Ti0.34Sb2.19Se (TSS) are 234°C and 160‡C, respectively. Detection of the crystal structure of TSS by means of XRD, TEM and XPS reveals that the grains are more uniform compared with Ge2Sb2Te5 (GST). The Set and Reset operation voltages for TSS-based phase change memory devices are much lower than those of conventional GST-based ones. Remarkably, the TSS device exhibits an extremely high phase change speed of 10 ns.

Paper Details

Date Published: 12 October 2016
PDF: 5 pages
Proc. SPIE 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 98180T (12 October 2016); doi: 10.1117/12.2246980
Show Author Affiliations
Yueqin Zhu, Shanghai Second Polytechnic Univ. (China)
Shanghai Institute of Microsystem and Information Technology (China)
Sannian Song, Shanghai Institute of Microsystem and Information Technology (China)
Le Li, Shanghai Institute of Microsystem and Information Technology (China)
Huaqing Xie, Shanghai Second Polytechnic Univ. (China)
Zhitang Song, Shanghai Institute of Microsystem and Information Technology (China)
Bo Liu, Shanghai Institute of Microsystem and Information Technology (China)
Junxing Wu, Shanghai Second Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 9818:
2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
Fuxi Gan; Zhitang Song; Yang Wang, Editor(s)

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