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Proceedings Paper

Influence of surface characteristics on point laser interferometer for aspheric measurement
Author(s): Xiaofei Diao; Zi Xue; Yanhui Kang
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Paper Abstract

A point laser interferometer for measuring aspheric optics is developed in this paper. The proposed laser interferometer will be used as a optical probe in optical coordinate measuring machines. The point optical probe is based on homodyne interferometry with frequency stabilized He-Ne laser to provide traceable measurements. The influences of various aspheric surface factors on the performance of point optical probe are analyzed, such as roughness, reflectivity, material, slope angle etc. A compensation method is applied in the signal processing system to reduce the influences. Experimental results show that the measurement resolution is at the nanometer level under various conditions.

Paper Details

Date Published: 19 October 2016
PDF: 9 pages
Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 1015523 (19 October 2016); doi: 10.1117/12.2246842
Show Author Affiliations
Xiaofei Diao, National Institute of Metrology (China)
Zi Xue, National Institute of Metrology (China)
Yanhui Kang, National Institute of Metrology (China)

Published in SPIE Proceedings Vol. 10155:
Optical Measurement Technology and Instrumentation
Sen Han; JiuBin Tan, Editor(s)

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