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Proceedings Paper

Cyclohexane-based optical coatings of diamond-like carbon
Author(s): William D. Partlow; Robert E. Witkowski; R. M. Young; Richard Fedder; Fred B. Hagedorn
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Paper Abstract

Protective and anti-reflective optical coatings of diamond-like carbon have been deposited on germanium and silicon substrates from glow discharges of cyclohexane. Films of excellent quality were obtained with high deposition rates using this non-hazardous feed gas. A parametric study was carried out to determine the dependence of the process characteristics and the optical properties of the films on the electrode bias gas pressure and flow. The study determined the contours for film refractive index and deposition rates over the parameter space and also revealed information on the dependence of infrared absorption and film adhesion. Important information on process scaling was determined. A simple dependence of negative self-bias on electrode design was obtained by using electrodes of different sizes. Changes in bias as a result of the coating of grounded reactor surfaces were measured. The effect of feed gas flow on the film and process properties provided insight into the impact of reactant depletion on the deposition process. 258 / SPIE Vol. 1325 Diamond Optics 111(1990)

Paper Details

Date Published: 1 December 1990
PDF: 9 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22465
Show Author Affiliations
William D. Partlow, Westinghouse Science and Techn (United States)
Robert E. Witkowski, Westinghouse Science and Techn (United States)
R. M. Young, Westinghouse Science and Techn (United States)
Richard Fedder, Westinghouse Electro-Optical Systems/Orlando (United States)
Fred B. Hagedorn, Westinghouse Electro-Optical Systems/Orlando (United States)

Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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