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Proceedings Paper

Electron cyclotron resonance radio-frequency hybrid plasma-deposited diamond-like carbon as an optical material
Author(s): Sri S. Sritharan; John S. Wilson; Pierre R. Barbier; Jacques I. Pankove
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Paper Abstract

Diamondlike carbon (DLC) is deposited by electron cyclotron resonance radio-frequency (ECR-RF) hybrid plasma method. The films are hard with optical bandgap ranges between 1. 1 and 1. 8 eV depending on the deposition parameters. Waveguide structures have been fabricated in DLC using liftoff technique. The films are also characterized by Electron energy loss spectroscopy and Raman spectroscopy. 2.

Paper Details

Date Published: 1 December 1990
PDF: 5 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22464
Show Author Affiliations
Sri S. Sritharan, Univ. of Colorado (United States)
John S. Wilson, Univ. of Colorado (United States)
Pierre R. Barbier, Univ. of Colorado (United States)
Jacques I. Pankove, Univ. of Colorado (United States)

Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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