Share Email Print
cover

Proceedings Paper

Interferometry measurement of parallel optical plate wavefront
Author(s): Yi Yang; Huan Ren; Zhendong Shi; Yong Liu; Xu Liu; Quan Yuan; Xiaoyu Yang; Lin Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, a method is introduced to test wavefront aberration of parallel optical plate wavefront, which based on Fourier transform. When testing the wavefront aberration of parallel optical plate, there is multiple-surface interference which phase-shifting interferometry cannot handle with. With the help of wavelength-modulation phase-shifting interferometry and Fourier transform, this method can isolate the multiple-surface interference fringes in frequency domain. This paper expound the principle of the method, and analyze the key parameter of the testing method: the suitable cavity/thickness ratio and sampling frame number. A simulation experiment is set up to verify the accuracy of this method, then the comparison test with traditional method shows that the relative deviation between the two methods is ≤5%.

Paper Details

Date Published: 27 September 2016
PDF: 6 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96843J (27 September 2016); doi: 10.1117/12.2246099
Show Author Affiliations
Yi Yang, Chinese Academy of Engineering Physics (China)
Huan Ren, Chinese Academy of Engineering Physics (China)
Zhendong Shi, Chinese Academy of Engineering Physics (China)
Yong Liu, Chinese Academy of Engineering Physics (China)
Xu Liu, Chinese Academy of Engineering Physics (China)
Quan Yuan, Chinese Academy of Engineering Physics (China)
Xiaoyu Yang, Chinese Academy of Engineering Physics (China)
Lin Zhang, Chinese Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top