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Proceedings Paper

Analysis of curved shape micro-mirrors for on-chip communication
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Paper Abstract

New ways of employing optics at the micro and nanometer scale are of interest. This study analyses the most common two micro-mirror shapes (i.e., spherical and parabolic) that can be used for on-chip communication - in conjunction with fiber optics/waveguides. The classical conic sections that can be used for micro-mirrors are described and a technological approach to design and manufacture such devices is presented. Finally an optimization of the parabolic micro-mirror is achieved. Other micro-mirror shapes (e.g., elliptical and hyperbolic) can be approached and compared using the same procedure. The large area of applications of such micro-mirrors includes intra- or inter-chips communications, as well as free-space optics used for various optical systems: micro-optics, optical amplifiers, lasers, and wavelength converters.

Paper Details

Date Published: 14 December 2016
PDF: 8 pages
Proc. SPIE 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII, 100101Y (14 December 2016); doi: 10.1117/12.2246019
Show Author Affiliations
Roxana Mariana Beiu, Aurel Vlaicu Univ. of Arad (Romania)
Corina Mnerie, Aurel Vlaicu Univ. of Arad (Romania)
Virgil-Florin Duma, Aurel Vlaicu Univ. of Arad (Romania)
Polytechnical Univ. of Timisoara (Romania)
West Univ. of Timisoara (Romania)


Published in SPIE Proceedings Vol. 10010:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII
Marian Vladescu; Cornel T. Panait; Razvan Tamas; George Caruntu; Ionica Cristea, Editor(s)

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