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Proceedings Paper

Surface passivation of backside-illuminated InSb FPAs
Author(s): Peng Wei; Kelin Zheng; Liwen Wang; Dongfeng Geng; Xianjun Su
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Paper Abstract

A method of passivation of etch-thinned bulk InSb by anodic oxide grown by wet anodization and vacuum deposition of SiNx layers have been investigated Thinned bulk n-type InSb with (111) orientation forms distinctively two types of interfaces on the indium and antimony faces, respectively. The junctions are diffused on the indium face. The paper presents the process and characterization for surface passivation of the backside illuminated Sb face that absorbs the photons. The surface passivation and the interfaces are characterized with Metal-Insulator-Semiconductor (MIS) devices. The effect of anodic oxide/SiNx passivation was compared to SiNx passivation. The electrical features observed in the C-V curves of MIS structures indicate that anodic oxide grown by wet anodization has the better effect on reducing the surface states and surface recombination velocity. The low-frequency-like response in the inversion region of the C-V curves was explained in view of the oxidation states of In and Sb. Finally, by growing the 30nm anodic oxide and depositing 400nm SiNx on diode structure of InSb, the performance of FPA in this case was compared with the SiNx only method. The results showed the performance of device is better than for the SiNx only method.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 10157, Infrared Technology and Applications, and Robot Sensing and Advanced Control, 1015716 (25 October 2016); doi: 10.1117/12.2245810
Show Author Affiliations
Peng Wei, Luoyang Optoelectro Technology Development Ctr. (China)
Kelin Zheng, Luoyang Optoelectro Technology Development Ctr. (China)
Liwen Wang, Luoyang Optoelectro Technology Development Ctr. (China)
Dongfeng Geng, Luoyang Optoelectro Technology Development Ctr. (China)
Xianjun Su, Luoyang Optoelectro Technology Development Ctr. (China)


Published in SPIE Proceedings Vol. 10157:
Infrared Technology and Applications, and Robot Sensing and Advanced Control

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