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Proceedings Paper

A field calibration method to eliminate the error caused by relative tilt on roll angle measurement
Author(s): Jingya Qi; Zhao Wang; Junhui Huang; Bao Yu; Jianmin Gao
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Paper Abstract

The roll angle measurement method based on a heterodyne interferometer is an efficient technique for its high precision and environmental noise immunity. The optical layout bases on a polarization-assisted conversion of the roll angle into an optical phase shift, read by a beam passing through the objective plate actuated by the roll rotation. The measurement sensitivity or the gain coefficient G is calibrated before. However, a relative tilt between the laser and objective plate always exist due to the tilt of the laser and the roll of the guide in the field long rail measurement. The relative tilt affect the value of G, thus result in the roll angle measurement error. In this paper, a method for field calibration of G is presented to eliminate the measurement error above. The field calibration layout turns the roll angle into an optical path change (OPC) by a rotary table. Thus, the roll angle can be obtained from the OPC read by a two-frequency interferometer. Together with the phase shift, an accurate G in field measurement can be obtained and the measurement error can be corrected. The optical system of the field calibration method is set up and the experiment results are given. Contrasted with the Renishaw XL-80 for calibration, the proposed field calibration method can obtain the accurate G in the field rail roll angle measurement.

Paper Details

Date Published: 24 November 2016
PDF: 6 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230B (24 November 2016); doi: 10.1117/12.2245718
Show Author Affiliations
Jingya Qi, Xi'an Jiaotong Univ. (China)
Zhao Wang, Xi'an Jiaotong Univ. (China)
Junhui Huang, Xi'an Jiaotong Univ. (China)
Bao Yu, Xi'an Jiaotong Univ. (China)
Jianmin Gao, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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