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Proceedings Paper

High-density grating pair for displacement measurement
Author(s): Changcheng Xiang; Changhe Zhou; Shubin Li; Zhumei Sun
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Paper Abstract

A novel method of displacement measurement based on a high density grating pair is proposed. When a laser beam is incident normal to a closely placed high density grating pair, efficiencies of transmission diffraction orders will change periodically along with the relative displacement of the two gratings in the grating period direction. The period of efficiency changing is equal to the grating period, thus measurement of displacement in the grating period direction can be achieved by detecting the power of diffraction orders.

Paper Details

Date Published: 31 October 2016
PDF: 6 pages
Proc. SPIE 10022, Holography, Diffractive Optics, and Applications VII, 1002211 (31 October 2016); doi: 10.1117/12.2245658
Show Author Affiliations
Changcheng Xiang, Shanghai Institute of Optics and Fine Mechanics (China)
Changhe Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Shubin Li, Shanghai Institute of Optics and Fine Mechanics (China)
Zhumei Sun, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 10022:
Holography, Diffractive Optics, and Applications VII
Yunlong Sheng; Chongxiu Yu; Changhe Zhou, Editor(s)

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