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Proceedings Paper

Numerical simulation research and applications on scattering imaging of surface defects on optical components
Author(s): Huiting Chai; Pin Cao; Yongying Yang; Chen Li; Fan Wu; Yihui Zhang; Haoliang Xiong; Lin Zhou; Kai Yan; Wenlin Xu; Dong Liu; Jian Bai; Yibing Shen
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Paper Abstract

The principle of microscopic scattering dark-field imaging is adopted in surface defects evaluation system (SDES) for large fine optics. However, since defects are of micron or submicron scale, scattering imaging cannot be described simply by geometrical imaging. In this paper, the simulation model of the electromagnetic field in defect scattering imaging is established on the basis of Finite-Difference Time-Domain (FDTD) method to study the scattering imaging properties of rectangular and triangular defects with different sizes by simulation. The criterion board with scribed lines and dots on it is used to carry out experiments scattering imaging and obtain grayscale value distributions of scattering dark-field images of scribed lines. The experiment results are in good agreement with the simulation results. Based on the above analysis, defect width extraction width is preliminary discussed. Findings in this paper could provide theoretical references for defect calibration in optical fabrication and inspection.

Paper Details

Date Published: 24 November 2016
PDF: 10 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230L (24 November 2016); doi: 10.1117/12.2245430
Show Author Affiliations
Huiting Chai, Zhejiang Univ. (China)
Pin Cao, Hangzhou Zernike Optical Technology Co., Ltd. (China)
Yongying Yang, Zhejiang Univ. (China)
Chen Li, Zhejiang Univ. (China)
Fan Wu, Zhejiang Univ. (China)
Yihui Zhang, Zhejiang Univ. (China)
Haoliang Xiong, Zhejiang Univ. (China)
Lin Zhou, Zhejiang Univ. (China)
Kai Yan, Zhejiang Univ. (China)
Wenlin Xu, Zhejiang Univ. (China)
Dong Liu, Zhejiang Univ. (China)
Jian Bai, Zhejiang Univ. (China)
Yibing Shen, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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