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Proceedings Paper

Research on the electron beam spot detection methods based on SEM
Author(s): Weixia Zhao; Junbiao Liu; Geng Niu; Yutian Ma; Li Han
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Paper Abstract

X-ray Nano-Computed Tomography (Nano-CT) is widely used in micro device nondestructive testing, material science, life science and other applications fields. Micro-focus X-ray source is one of the key components of Nano-CT and is directly affected by the quality of electron beam. Diameter is the key performance index of electron beam. The detection of electron beam spot diameter is of great significance for monitoring the performance of Nano-CT and quantitatively evaluating the qualities of design and fabrication of the electron gun and electron optical system. In this paper, the diameter direct detecting method is presented and applied to the FEI Quanta 600 SEM. The relationship between electron beam diameter and detecting curve is analyzed at first, then the application feature of diameter detecting methods, including crosshair detecting method, slit detecting method and single edge detecting method, is researched and compared. Furthermore, the experimental results demonstrate that the edge detection has higher detecting accuracy and lower requirement on the sampler, and that after computation the detecting error is within 20 nm.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 96870C (25 October 2016); doi: 10.1117/12.2245029
Show Author Affiliations
Weixia Zhao, Institute of Electrical Engineering (China)
Junbiao Liu, Institute of Electrical Engineering (China)
Geng Niu, Institute of Electrical Engineering (China)
Yutian Ma, Institute of Electrical Engineering (China)
Li Han, Institute of Electrical Engineering (China)


Published in SPIE Proceedings Vol. 9687:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
Shinan Qian; Mourad Idir; Daniele Cocco; Tiqiao Xiao; Kazuto Yamauchi, Editor(s)

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