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Proceedings Paper

Soft dielectric cantilevers with silicon tips for atomic force microscopy applications
Author(s): Paweł Janus; Rafał Dobrowolski; Andrzej Sierakowski; Francesco Ivaldi; Dariusz Szmigiel; Jerzy Zając
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Paper Abstract

In this paper authors present design, technology and application of soft silicon dioxide AFM cantilevers. Novel technology allows for manufacturing ultra-soft cantilevers equipped with silicon tip. Mechanical properties of developed probes were tested and finally applied in AFM measurements of fragile samples.

Paper Details

Date Published: 10 November 2016
PDF: 6 pages
Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 1016104 (10 November 2016); doi: 10.1117/12.2244789
Show Author Affiliations
Paweł Janus, Instytut Technologii Elektronowej (Poland)
Rafał Dobrowolski, Instytut Technologii Elektronowej (Poland)
Andrzej Sierakowski, Instytut Technologii Elektronowej (Poland)
Francesco Ivaldi, Instytut Technologii Elektronowej (Poland)
Dariusz Szmigiel, Instytut Technologii Elektronowej (Poland)
Jerzy Zając, Instytut Technologii Elektronowej (Poland)

Published in SPIE Proceedings Vol. 10161:
14th International Conference on Optical and Electronic Sensors
Piotr Jasiński, Editor(s)

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