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Proceedings Paper

Characterization of microwave plasma CVD of diamond by mass analysis and optical emission spectroscopy
Author(s): Wayne A. Weimer; Curtis E. Johnson
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Paper Details

Date Published: 1 December 1990
PDF: 7 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22447
Show Author Affiliations
Wayne A. Weimer, Naval Weapons Ctr. (United States)
Curtis E. Johnson, Naval Weapons Ctr. (United States)

Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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