Share Email Print
cover

Proceedings Paper

Characterization of microwave plasma CVD of diamond by mass analysis and optical emission spectroscopy
Author(s): Wayne A. Weimer; Curtis E. Johnson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 December 1990
PDF: 7 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22447
Show Author Affiliations
Wayne A. Weimer, Naval Weapons Ctr. (United States)
Curtis E. Johnson, Naval Weapons Ctr. (United States)


Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

© SPIE. Terms of Use
Back to Top