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Proceedings Paper

Low-pressure CVD for wide-area diamond film deposition at low temperatures
Author(s): Akio Hiraki; Hiroshi Kawarada; Jin Wei; Jing Sheng Ma; Junichi Suzuki
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Paper Details

Date Published: 1 December 1990
PDF: 8 pages
Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22444
Show Author Affiliations
Akio Hiraki, Osaka Univ. (Japan)
Hiroshi Kawarada, Osaka Univ. (Japan)
Jin Wei, Osaka Univ. (Japan)
Jing Sheng Ma, Osaka Univ. (Japan)
Junichi Suzuki, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 1325:
Diamond Optics III
Albert Feldman; Sandor Holly, Editor(s)

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