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Proceedings Paper

Effect of oxygen flow on the structure and optical properties of the Gd2O3 optical films
Author(s): Siyu Wang; Ping Ma; Yunti Pu; Zhao Qiao; Mingxiao Zhang; Zhongwen Lu; Dongxu Peng
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Paper Abstract

Gd2O3 thin films were deposited by Ion-beam sputtering (IBS) under the oxygen flow of 0 sccm~30 sccm. The structure and optical properties of the Gd2O3 optical films were investigated by Lambdar950 spectrophotometer, laser calorimetry and atomic force microscopy (AFM). When oxygen flow was less than 10 sccm, with the increase of oxygen flow, the transmittance of the films increased, at the same time absorptance and the surface roughness of the films decreased. While the flow was more than 10 sccm, with the increase of the flow rate, the surface roughness of the films increased, but the transmittance and absorptance did not show any apparent change. The results show that both the structure and optical properties are closely related to the flow of oxygen. XPS measurements demonstrated that when the oxygen flow increase from 0 sccm to 10 sccm, the defect oxygen decreases. But when the oxygen flow increase from 10 sccm to 30 sccm, the defect oxygen increase. The XPS spectra show that when the oxygen flow was 10 sccm, the defect oxygen was the least. Thus when the oxygen flow was 10 sccm, the structure and optical properties of the Gd2O3 optical films were the best.

Paper Details

Date Published: 28 October 2016
PDF: 6 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968325 (28 October 2016); doi: 10.1117/12.2244275
Show Author Affiliations
Siyu Wang, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)
Yunti Pu, Chengdu Fine Optical Engineering Research Ctr. (China)
Zhao Qiao, Chengdu Fine Optical Engineering Research Ctr. (China)
Mingxiao Zhang, Chengdu Fine Optical Engineering Research Ctr. (China)
Zhongwen Lu, Chengdu Fine Optical Engineering Research Ctr. (China)
Dongxu Peng, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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