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Proceedings Paper

Physical and optical properties of TiO2 nanolayers for integrated photonics application
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Paper Abstract

The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.

Paper Details

Date Published: 10 November 2016
PDF: 5 pages
Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 101610E (10 November 2016); doi: 10.1117/12.2244141
Show Author Affiliations
Przemysław Struk, Silesian Univ. of Technology (Poland)
Tadeusz Pustelny, Silesian Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10161:
14th International Conference on Optical and Electronic Sensors
Piotr Jasiński, Editor(s)

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