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Proceedings Paper

Research on large aperture multi-angle multi-surface mirror process technology
Author(s): Ying Huang; Manze He; Dingyao Yan; Yibin Liu
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Paper Abstract

Light weighted multi-angle multi-surface mirror is made of glass-ceramic, with the structural characteristic of multicavity thin wall, high precision of surface figure and angle between surfaces, has very different processing technology with traditional solid mirror. Based on the 460mm×434mm×80mm multi-angle multi-surface mirror, glass combination manufacture method and relevant interferometry of angle measurement was designed. The process technology was studied, then the consistency of angle between surfaces and the influence on multi-cavity thin wall deformation of lateral surface and material of polishing pad on the surface figure processing were controlled. The model between the variation of angle and load was established, from which the hysteresis of angle variation was analyzed, then the prototype workpiece was finished. The difficult problem on synchronically controlling the surface angles and surface figure of the mirror, which has high center of gravity and multi-cavity thin wall, was solved. The lateral surface figure was controlled below λ/6 (PV, λ=632.8nm), and the perpendicularity of lateral surfaces were controlled below 5''.

Paper Details

Date Published: 28 October 2016
PDF: 6 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96832C (28 October 2016); doi: 10.1117/12.2244009
Show Author Affiliations
Ying Huang, Chengdu Fine Optical Engineering Research Ctr. (China)
Manze He, Chengdu Fine Optical Engineering Research Ctr. (China)
Dingyao Yan, Chengdu Fine Optical Engineering Research Ctr. (China)
Yibin Liu, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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