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Proceedings Paper

Effect of polishing induced subsurface damages on laser induced damage in fused silica optics
Author(s): Xiang He; Heng Zhao; Ying Huang; Chao Cai; JiangChuan Hu; Ping Ma
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Paper Abstract

Conventional used ceria polishing would induce both of Ce contaminants and subsurface damages, which mainly restricts the laser induced damage resistance of fused silica optics. To control the near surface defects, nanometer sized colloidal silica are used to polish fused silica optics after the normal ceria polishing process. Then the contaminant elements and subsurface damages of the polished samples were analyzed by secondary ion mass spectrometry and Nomarski microscopy. It reveals that ceria polishing would introduce lots of subsurface damages whereas colloidal silica polishing induces much fewer subsurface damages especially no fracture induced severe subsurface damages. The laser damage tests reveal that subsequent colloidal silica polishing of the ceria pre-polished samples could gradually eliminate the ceria polishing induced subsurface damages and lower the laser induced damage density accordingly with the increased polishing time. But unlike the damage density, only the severe subsurface damages are totally eliminated could the damage threshold be substantially improved. These results incline to indicate that the subsurface damages have great influence on the laser induced damage density and the fracture related severe subsurface damages will greatly restrict the damage threshold in polished optics.

Paper Details

Date Published: 28 October 2016
PDF: 8 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968326 (28 October 2016); doi: 10.1117/12.2244005
Show Author Affiliations
Xiang He, Chengdu Fine Optical Engineering Research Ctr. (China)
Heng Zhao, Chengdu Fine Optical Engineering Research Ctr. (China)
Ying Huang, Chengdu Fine Optical Engineering Research Ctr. (China)
Chao Cai, Chengdu Fine Optical Engineering Research Ctr. (China)
JiangChuan Hu, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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