Share Email Print
cover

Proceedings Paper

A new multi-probe scanning method for measuring optical surface
Author(s): Dede Zhai; Ziqiang Yin; Shanyong Chen; Fujing Tian
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In form metrology, multi-probe scanning method based on error separation technique can be used successfully to eliminate motion error of slideway. Due to high repeatability of flexure hinge, a virtual multiple sensor concept is presented. The system employs a single probe with the accurate movement of flexure hinge to achieve virtual multiprobe. This single probe scanning method can realize and extend the function of multiple-probe method. This paper describes the principle of this new method; Measurement process of method is modeled and the predefined test curve is reconstructed by the application of simultaneous equation and least-squares methods. It shows that scanning systems with virtual multiple sensors allow the influence of random and systematic errors to be reduced. We also conducted the experiment repeatedly to measure the profile of workpiece. It shows that reconstructed curves in each experiment are nearly superposed.

Paper Details

Date Published: 27 September 2016
PDF: 6 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841K (27 September 2016); doi: 10.1117/12.2243800
Show Author Affiliations
Dede Zhai, National Univ. of Defense Technology (China)
Hunan Key Lab. of Ultra-precision Machining Technology (China)
Ziqiang Yin, National Univ. of Defense Technology (China)
Hunan Key Lab. of Ultra-precision Machining Technology (China)
Shanyong Chen, National Univ. of Defense Technology (China)
Hunan Key Lab. of Ultra-precision Machining Technology (China)
Fujing Tian, National Univ. of Defense Technology (China)
Hunan Key Lab. of Ultra-precision Machining Technology (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top