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Proceedings Paper

Dimensional measurement of micro parts with high aspect ratio in HIT-UOI
Author(s): Hong Dang; Jiwen Cui; Kunpeng Feng; Junying Li; Shiyuan Zhao; Haoran Zhang; Jiubin Tan
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Paper Abstract

Micro parts with high aspect ratios have been widely used in different fields including aerospace and defense industries, while the dimensional measurement of these micro parts becomes a challenge in the field of precision measurement and instrument. To deal with this contradiction, several probes for the micro parts precision measurement have been proposed by researchers in Center of Ultra-precision Optoelectronic Instrument (UOI), Harbin Institute of Technology (HIT). In this paper, optical fiber probes with structures of spherical coupling(SC) with double optical fibers, micro focal-length collimation (MFL-collimation) and fiber Bragg grating (FBG) are described in detail. After introducing the sensing principles, both advantages and disadvantages of these probes are analyzed respectively. In order to improve the performances of these probes, several approaches are proposed. A two-dimensional orthogonal path arrangement is propounded to enhance the dimensional measurement ability of MFL-collimation probes, while a high resolution and response speed interrogation method based on differential method is used to improve the accuracy and dynamic characteristics of the FBG probes. The experiments for these special structural fiber probes are given with a focus on the characteristics of these probes, and engineering applications will also be presented to prove the availability of them. In order to improve the accuracy and the instantaneity of the engineering applications, several techniques are used in probe integration. The effectiveness of these fiber probes were therefore verified through both the analysis and experiments.

Paper Details

Date Published: 24 November 2016
PDF: 13 pages
Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100231J (24 November 2016); doi: 10.1117/12.2243738
Show Author Affiliations
Hong Dang, Harbin Institute of Technology (China)
Jiwen Cui, Harbin Institute of Technology (China)
Kunpeng Feng, Harbin Institute of Technology (China)
Junying Li, Harbin Institute of Technology (China)
Shiyuan Zhao, Harbin Institute of Technology (China)
Haoran Zhang, Harbin Institute of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 10023:
Optical Metrology and Inspection for Industrial Applications IV
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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