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Proceedings Paper

High precision locating control system based on VCM for Talbot lithography
Author(s): Jingwei Yao; Lixin Zhao; Qian Deng; Song Hu
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Paper Abstract

Aiming at the high precision and efficiency requirements of Z-direction locating in Talbot lithography, a control system based on Voice Coil Motor (VCM) was designed. In this paper, we built a math model of VCM and its moving characteristic was analyzed. A double-closed loop control strategy including position loop and current loop were accomplished. The current loop was implemented by driver, in order to achieve the rapid follow of the system current. The position loop was completed by the digital signal processor (DSP) and the position feedback was achieved by high precision linear scales. Feed forward control and position feedback Proportion Integration Differentiation (PID) control were applied in order to compensate for dynamic lag and improve the response speed of the system. And the high precision and efficiency of the system were verified by simulation and experiments. The results demonstrated that the performance of Z-direction gantry was obviously improved, having high precision, quick responses, strong real-time and easily to expend for higher precision.

Paper Details

Date Published: 25 October 2016
PDF: 8 pages
Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850L (25 October 2016); doi: 10.1117/12.2243616
Show Author Affiliations
Jingwei Yao, Institution of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Lixin Zhao, Institution of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Qian Deng, Institution of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Song Hu, Institution of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9685:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
Xiangang Luo; Tianchun Ye; Tingwen Xin; Song Hu; Minghui Hong; Min Gu, Editor(s)

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