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Proceedings Paper

Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters
Author(s): Lichao Xu; Yongjian Wan; Haitao Liu; Jia Wang
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Paper Abstract

Smoothing is a convenient and efficient way to restrain middle spatial frequency (MSF) errors. Based on the experience, lap diameter, rotation speed, lap pressure and the hardness of pitch layer are important to correcting MSF errors. Therefore, nine groups of experiments are designed with the orthogonal method to confirm the significance of the above parameters. Based on the Zhang’s model, PV (Peak and Valley) and RMS (Root Mean Square) versus processing cycles are analyzed before and after smoothing. At the same time, the smoothing limit and smoothing rate for different parameters to correct MSF errors are analyzed. Combined with the deviation analysis, we distinguish between dominant and subordinate parameters, and find out the optimal combination and law of various parameters, so as to guide the further research and fabrication.

Paper Details

Date Published: 28 October 2016
PDF: 6 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831W (28 October 2016); doi: 10.1117/12.2243613
Show Author Affiliations
Lichao Xu, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Haitao Liu, Institute of Optics and Electronics (China)
Jia Wang, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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