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Proceedings Paper

Topography measurement of micro structure by modulation-based method
Author(s): Yi Zhou; Yan Tang; Junbo Liu; Qinyuan Deng; Yiguang Cheng; Song Hu
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Paper Abstract

Dimensional metrology for micro structure plays an important role in addressing quality issues and observing the performance of micro-fabricated products. Different from the traditional white-light interferometry approach, the modulation-based method is expected to measure topography of micro structure by the obtained modulation of each interferometry image. Through seeking the maximum modulation of every pixel respectively in Z direction, the method could obtain the corresponding height of individual pixel and finally get topography of the structure. Owing to the characteristic of modulation, the proposed method which is not influenced by the change of background light intensity caused by instable light source and different reflection index of the structure could be widely applied with high stability. The paper both illustrates the principle of this novel method and conducts the experiment to verify the feasibility.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 968505 (25 October 2016); doi: 10.1117/12.2243599
Show Author Affiliations
Yi Zhou, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yan Tang, Institute of Optics and Electronics (China)
Junbo Liu, Institute of Optics and Electronics (China)
Qinyuan Deng, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Yiguang Cheng, Institute of Optics and Electronics (China)
Song Hu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9685:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
Xiangang Luo; Tianchun Ye; Tingwen Xin; Song Hu; Minghui Hong; Min Gu, Editor(s)

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