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Proceedings Paper

Structural refinement of superlattices from x-ray diffraction
Author(s): Ivan K. Schuller; E. Fullerton; H. Vanderstraeten; Yvon Bruynseraede
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Paper Abstract

We have performed extensive model calculations in order to understand the effect that roughness has on the X-ray diffraction from multilayers. We have developed models to calculate the low and the high angle X-ray diffraction spectra, including kinematic and dynamical simulations. These model calculations were used to understand a variety of systems including crystalline/crystalline, crystalline/amorphous and amorphous/amorphous multilayers. These model calculations were compared with the diffraction spectra of multilayered systems prepared using sputtering and Molecular Beam Epitaxy (MBE) techniques. Using the experience acquired from these model calculations we have recently developed a comprehensive nonlinear optimization program to refine the structure of multilayers from X-ray diffraction spectra. Kinematic formulation is used to refine the high angle data and dynamical (Fresnel) formalism was used to fit the low angle spectra. A comparison of the results obtained from the structural refinements with EXAFS and artificially prepared rough multilayers indicates that this type of approach give a reliable and speedy determination of the roughness, interdiffusion and lattice parameter variations in multilayers. This work has been described in a number of papers in the last few years.

Paper Details

Date Published: 1 December 1990
PDF: 2 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22435
Show Author Affiliations
Ivan K. Schuller, Univ. of California/San Diego (United States)
E. Fullerton, Univ. of California/San Diego (United States)
H. Vanderstraeten, Katholieke Univ. Leuven (Belgium)
Yvon Bruynseraede, Katholieke Univ. Leuven (Belgium)

Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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