Share Email Print
cover

Proceedings Paper

Direct optical patterning of poly(dimethylsiloxane) microstructures for microfluidic chips
Author(s): Shaorui Gao; Wing-Tai Tung; Dexter Siu-Hong Wong; Liming Bian; A. Ping Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In this paper, we present an optical maskless exposure approach for direct patterning of large-area high resolution microfluidic chips using photosensitive poly(dimethylsiloxane) (PDMS) materials. Both positive- and negative-tone photosensitive PDMS (photoPDMS) were successfully patterned into various microfluidic devices with complex geometries by using an optical maskless lithography process. The positive-tone PDMS is used for patterning of largearea chips, while the negative-tone PDMS is demonstrated to fabricate high-resolution microstructures and on-chip devices. With the seamless pattern-stitching technique, a large-area microfluidic chip with size of 5.5 × 2.8 cm2 with complex three-dimensional (3D) staggered herringbone mixers (SHMs) for micro-flow gradient generation has been directly fabricated within 125 minutes by using the positive-tone PDMS. A small microfluidic chip with feature size as small as 5 μm is demonstrated by using the negative-tone PDMS. The experimental results reveal that the optical maskless lithography technology enables to rapidly pattern high-resolution microstructures and is very promising for development of lab-on-a-chip devices.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850X (25 October 2016); doi: 10.1117/12.2243464
Show Author Affiliations
Shaorui Gao, The Hong Kong Polytechnic Univ. (Hong Kong, China)
Wing-Tai Tung, The Hong Kong Polytechnic Univ. (Hong Kong, China)
Dexter Siu-Hong Wong, The Chinese Univ. of Hong Kong (Hong Kong, China)
Liming Bian, The Chinese Univ. of Hong Kong (Hong Kong, China)
A. Ping Zhang, The Hong Kong Polytechnic Univ. (Hong Kong, China)


Published in SPIE Proceedings Vol. 9685:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
Xiangang Luo; Tianchun Ye; Tingwen Xin; Song Hu; Minghui Hong; Min Gu, Editor(s)

© SPIE. Terms of Use
Back to Top