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Proceedings Paper

Analysis of absolute flatness testing in sub-stitching interferometer
Author(s): Xin Jia; Fuchao Xu; Weimin Xie; Tingwen Xing
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Paper Abstract

Sub-aperture stitching is an effective way to extend the lateral and vertical dynamic range of a conventional interferometer. The test accuracy can be achieved by removing the error of reference surface by the absolute testing method. When the testing accuracy (repeatability and reproducibility) is close to 1nm, in addition to the reference surface, other factors will also affect the measuring accuracy such as environment, zoom magnification, stitching precision, tooling and fixture, the characteristics of optical materials and so on. In the thousand level cleanroom, we establish a good environment system. Long time stability, temperature controlled at 22°±0.02°.The humidity and noise are controlled in a certain range. We establish a stitching system in the clean room. The vibration testing system is used to test the vibration. The air pressure testing system is also used. In the motion system, we control the tilt error no more than 4 second to reduce the error. The angle error can be tested by the autocollimator and double grating reading head.

Paper Details

Date Published: 27 September 2016
PDF: 6 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968438 (27 September 2016); doi: 10.1117/12.2243462
Show Author Affiliations
Xin Jia, Institute of Optics and Electronics (China)
Fuchao Xu, Institute of Optics and Electronics (China)
Weimin Xie, Institute of Optics and Electronics (China)
Tingwen Xing, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

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