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Proceedings Paper

Evaluation of figure accuracy of Wolter mirror fabricated by electroforming
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Paper Abstract

The Wolter mirror is a promising imaging device for soft x-ray microscopy owing to its excellent characteristics. Its annular aperture enables high-NA design while maintaining high photon transfer efficiency. However, its deep and narrow cylinder-like shape makes its fabrication difficult. Despite its long history, the Wolter mirror has not been practically used for high-resolution microscopy. We have been developing a fabrication process for grazing incidence mirrors with rotationally symmetric shapes. The mirrors are replicated from precisely machined mandrels. We employ electroforming as a replication method with high replication accuracy and reproductivity. Here, we report the first fabrication of a Wolter mirror and discuss the replication quality in electroforming. The imaging quality of Wolter mirror is also evaluated in an observation experiment using a visible-light microscope.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 968705 (25 October 2016); doi: 10.1117/12.2243422
Show Author Affiliations
Satoru Egawa, The Univ. of Tokyo (Japan)
Takehiro Kume, The Univ. of Tokyo (Japan)
Yoko Takeo, The Univ. of Tokyo (Japan)
Yoshinori Takei, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 9687:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
Shinan Qian; Mourad Idir; Daniele Cocco; Tiqiao Xiao; Kazuto Yamauchi, Editor(s)

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