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Proceedings Paper

Evaluation of the properties of the permeability film material using cellulose nanofibers
Author(s): Naoto Sugino; Shinya Nakajima; Takao Kameda; Satoshi Takei; Makoto Hanabata
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Paper Abstract

In order to enable the large-area patterning of micro-fabrication, constant intensity will be required to the mold material. Then, we have deposited the sample was subjected to a chemical synthesis in different hydroxy propyl cellulose (HPC) viscosity, we evaluated its transferability and optical transparency. As a result of gel permeation chromatography system (GPC) measurement, we confirmed that high viscosity sample was high molecular weight in the two types of HPC with different viscosity. Further, we will produce a film with the sample, we evaluated the transfer and light permeability of the film. In the evaluation of transfer properties, Regardless of the level of the viscosity of the HPC of the main raw material, the shape of the master silicon template(5μm line and space) had been transferred to the HPC template. Moreover in the evaluation of optical transparency, HPC template had about 60% of the light transmittance in the 365nm wavelength. The sample have a possibility to improve the strength to be polymerized, and a high optical transparency, it used in this study is expected to be a mold material for UV nano-imprint lithography.

Paper Details

Date Published: 4 October 2016
PDF: 6 pages
Proc. SPIE 9985, Photomask Technology 2016, 99851I (4 October 2016); doi: 10.1117/12.2243418
Show Author Affiliations
Naoto Sugino, Sanko Gosei Ltd. (Japan)
Shinya Nakajima, Toyama Prefectural Univ. (Japan)
Takao Kameda, Sanko Gosei Ltd. (Japan)
Satoshi Takei, Toyama Prefectural Univ. (Japan)
Makoto Hanabata, Toyama Prefectural Univ. (Japan)

Published in SPIE Proceedings Vol. 9985:
Photomask Technology 2016
Bryan S. Kasprowicz; Peter D. Buck, Editor(s)

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