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Proceedings Paper

Detection for flatness of large surface based on structured light
Author(s): Wenyan He; Xuedong Cao; Kuang Long; Zhang Peng
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Paper Abstract

In order to get flatness of a large plane, this paper set up a measurement system, composed by Line Structured Light, imaging system, CCD, etc. Line Structured Light transmits parallel fringes at a proper angle onto the plane which is measured; the imaging system and CCD locate above the plane to catch the fringes. When the plane is perfect, CCD will catch straight fringes; however, the real plane is not perfect; according to the theory of projection, the fringes caught by CCD will be distorted by convex and concave. Extract the center of line fringes to obtain the distortion of the fringe, according to the functional relationship between the distortion of fringes and the height which is measured, then we will get flatness of the entire surface. Data from experiment approached the analysis of theory. In the simulation, the vertical resolution is 0.0075 mm per pixel when measuring a plane of 400mm×400mm, choosing the size of CCD 4096×4096, at the angle 85°. Helped by sub-pixel, the precision will get the level of submicron. There are two obvious advantages: method of surface sampling can increase the efficiency for auto-repairing of machines; considering the center of fringe is required mainly in this system, as a consequence, there is no serious demand for back light.

Paper Details

Date Published: 27 September 2016
PDF: 7 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841W (27 September 2016); doi: 10.1117/12.2243409
Show Author Affiliations
Wenyan He, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Xuedong Cao, Univ. of Chinese Academy of Sciences (China)
Kuang Long, Univ. of Chinese Academy of Sciences (China)
Zhang Peng, Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

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