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Proceedings Paper

Study on machining deformation of the ultra-thin mirror
Author(s): Hao Zhang; Peng Wang
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Paper Abstract

In shape processing of the ultra-thin mirror, deformation will be produced under cutting forces, which is a major cause of quality deterioration. An ultra-thin mirror with diameter-thickness ratio more than 10 is studied in this paper. Rigidity characteristic of the grinding process by diamond wheel is analyzed by FEM. A receptance model of the micro-cutting process and the surface accuracy is established by a self-adaptive multi-scale method according the first strength method. And the effectiveness of the mathematical model is verified by experience. And the dynamic stiffness caused by grinding is optimized. As a result, deformation of the optical surface is reduced to 0.004λ and the acceptable surface accuracy can be achieved.

Paper Details

Date Published: 28 October 2016
PDF: 6 pages
Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968318 (28 October 2016); doi: 10.1117/12.2243317
Show Author Affiliations
Hao Zhang, Tianjin Jinhang Institute of Technical Physics (China)
Peng Wang, Tianjin Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 9683:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Wenhan Jiang; Li Yang; Oltmann Riemer; Shengyi Li; Yongjian Wan, Editor(s)

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