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Proceedings Paper

Features of the formation of structure and properties of transition metals boridonitrides composite films
Author(s): Alexander A. Goncharov; Andrey N. Yunda; Tomasz N. Kołtunowicz
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Paper Abstract

Researches of formation features of nanostructured film condensates deposited by reactive magnetron (HF and DC) sputtering of transition metals diborides targets was analyzed. Amorphous-crystalline composite film (MeB2 + BN), consisting of grains of nanocrystalline phase MeB2 and amorphous graphite-like phase BN filling intergranular space, is formed at reactive sputtering in (Ar + N2) mixture. Investigations of composition and physico-mechanical properties of transition metals boridenitrides composite films were carried out. The amount of phase МеВ2 decreases, and phase BN enlarges with an increase in percentage content of nitrogen in a mixture, that leads to hardness and elastic modulus reduction respectively and to elasticity increase of boridonitrides thin films compared with diborides films. It is shown that viscoelasticity of Me–B–N thin films is caused by the presence of amorphous boron nitride phase.

Paper Details

Date Published: 14 December 2016
PDF: 7 pages
Proc. SPIE 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII, 100100D (14 December 2016); doi: 10.1117/12.2243275
Show Author Affiliations
Alexander A. Goncharov, Sumy State Univ. (Ukraine)
Andrey N. Yunda, Sumy State Univ. (Ukraine)
Tomasz N. Kołtunowicz, Lublin Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 10010:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII
Marian Vladescu; Cornel T. Panait; Razvan Tamas; George Caruntu; Ionica Cristea, Editor(s)

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