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Proceedings Paper

Analysis of adjustment error in aspheric null testing with CGH
Author(s): Yiwei He; Hou Xi; Qiang Chen; Fan Wu; Chaoqiang Li; Xiaoqiang Zhu; Weihong Song
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Paper Abstract

Generally, in order to gain high accuracy in aspheric testing, a piece of high-quality CGH (computer generated hologram) is inserted behind transmission sphere to generate specified wave-front to match aspheric part. According to the difference in function, the CGH is divided into 2 parts: the center region, called as testing hologram, is used to generate specified aspheric wave-front; the outer ring, called as alignment hologram, is used to align the location of CGH behind transmission sphere. Although alignment hologram is used, there is still some adjustment error from both CGH and aspheric part, such as tilt, eccentricity and defocus. Here we will stimulate the effect of these error sources on the accuracy that is rms after the piston, tilt and power are removed, when testing a specified aspheric part. It is easy to conclude that the total measurement error is about 2 nm and the defocus of CGH contributes most.

Paper Details

Date Published: 27 September 2016
PDF: 5 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 968444 (27 September 2016); doi: 10.1117/12.2243226
Show Author Affiliations
Yiwei He, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Hou Xi, Institute of Optics and Electronics (China)
Qiang Chen, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Chaoqiang Li, Institute of Optics and Electronics (China)
Xiaoqiang Zhu, Institute of Optics and Electronics (China)
Weihong Song, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

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