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Proceedings Paper

Design on electromagnetic actuator of aerostatic bearing stylus displacement sensor
Author(s): Junwei Wang; Suping Chang; Xiaojun Liu; Wenlong Lu; Yanling Sun; Chunbing Hu
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Paper Abstract

This paper discusses electromagnetic force actuator and configuration design of the aerostatic bearing stylus displacement sensor for the surface topography measurement. This stylus displacement sensor is designed based on the structure of direct metrology of stylus displacement, and aerostatic bearing is utilized to achieve the precise linear movement of stylus, with which the profiler measurement system has high precision without non-linear error. During the measurement process, the attitude of the stylus is adjusted by electromagnetic force to control the contact force between stylus and surface, thus the electromagnetic force analysis and implement is the key component to support the constant measurement force. The electromagnetic actuator combined permanent magnet with coils is designed to achieve the electromagnetic force precisely. The results of the numerical analysis and experiments indicate that the electromagnetic actuator can balance the gravity of stylus and keep a constant contacting force during the measurement. The surface topography measurement system based on aerostatic bearing stylus displacement sensor is constructed and the primarily experiment result is also given.

Paper Details

Date Published: 27 September 2016
PDF: 6 pages
Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841O (27 September 2016); doi: 10.1117/12.2243138
Show Author Affiliations
Junwei Wang, Huazhong Univ. of Science and Technology (China)
Suping Chang, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)
Wenlong Lu, Huazhong Univ. of Science and Technology (China)
Yanling Sun, Hubei Univ. of Arts and Science (China)
Chunbing Hu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9684:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Yudong Zhang; Fan Wu; Ming Xu; Sandy To, Editor(s)

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