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Proceedings Paper

Synthesis and characterization of lithium tantalate thin films fabricated by sol-gel method
Author(s): Binwei Sun; Dong Pan; Zehua Huang; Jun Wang; Yadong Jiang
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Paper Abstract

Multilayer lithium tantalate thin films have been successfully prepared on Pt/Ti/SiO2/Si(100) substrate using sol-gel and spin-coating method. Polycrystalline perovskite films were obtained through pyrolysis at 400°C and subsequent calcination at various temperatures from 500°C to 700°C for 1h, which were optimized by means of X-ray diffraction, Raman spectroscopy and thermal analysis. The morphology on the top surface and fractured cross section of LT films was observed by a field-emission scanning electron microscope. The 300 nm thick LT film annealed at 650°C exhibited a dielectric constant of 19.8 and a loss tangent of 0.06 at10KHz.

Paper Details

Date Published: 25 October 2016
PDF: 6 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968611 (25 October 2016); doi: 10.1117/12.2242862
Show Author Affiliations
Binwei Sun, Univ. of Electronic Science and Technology of China (China)
Dong Pan, Univ. of Electronic Science and Technology of China (China)
Zehua Huang, Univ. of Electronic Science and Technology of China (China)
Jun Wang, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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