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Proceedings Paper

Effects of annealing time on the application of vanadium dioxide films in smart windows
Author(s): Chunhui Ji; Zhiming Wu; Xuefei Wu; Haoqian Feng; Xueting Ma; Yadong Jiang
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Paper Abstract

Vanadium dioxide (VO2) films have great potential applications in photoelectric switching, storage devices, terahertz modulators and smart windows, due to the abruptly insulator-metal phase transition (IMT) near room temperature. In this research, vanadium oxide films were deposited by DC reactive magnetron sputtering in different annealing time of 450°C on glass substrates. As for electrical properties, the increasing of annealing time turns out sheet resistance increases at first, and then decreases in insulating phase, vice versa in metallic phase. In optical properties, the visible transmittance of VO2 films initially drops with annealing time prolonging, afterwards the transmittance slightly recovers. Differences between the electrical and optical are due to the grain size. Moreover, VO2 film annealing 15 min presents excellent visible transmittance, highly near-IR modulation efficiency (about 92% at a wavelength of 1100nm) and the lowest phase transition temperature (55.7°C). This result indicates that an appropriate annealing ambient can facilitate the application of VO2 film in smart windows.

Paper Details

Date Published: 25 October 2016
PDF: 8 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 968612 (25 October 2016); doi: 10.1117/12.2242821
Show Author Affiliations
Chunhui Ji, Univ. of Electronic Science and Technology of China (China)
Zhiming Wu, Univ. of Electronic Science and Technology of China (China)
Xuefei Wu, Univ. of Electronic Science and Technology of China (China)
Haoqian Feng, Univ. of Electronic Science and Technology of China (China)
Xueting Ma, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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