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Proceedings Paper

Fabrication and parameters calculation of terahertz detector with resonance cavity structure
Author(s): Zhiqing Liang; Ziji Liu; Zheng dong Ma; He Yu; Tao Wan; Yadong Jiang
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Paper Abstract

Terahertz (THz) detector indicates great potentials in detecting application because of real-time, compact bulk and unique spectral characteristics. Small dimension and integration THz detectors based on resonance cavity structure were designed and simulated to get optimizing THz detector parameters from the simulation results of membrane temperature changing. The THz detector was fabricated with complex semiconductor process and three dimension thermal variation of resonance cavity were obtained by simulation to identify the resonance cavity design. The electrical response time of THz detector could be as low as 5ms, which is suitable for the application of fast response THz detecting.

Paper Details

Date Published: 25 October 2016
PDF: 5 pages
Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96860N (25 October 2016); doi: 10.1117/12.2242812
Show Author Affiliations
Zhiqing Liang, Univ. of Electronic Science and Technology of China (China)
Ziji Liu, Univ. of Electronic Science and Technology of China (China)
Zheng dong Ma, Univ. of Electronic Science and Technology of China (China)
He Yu, Univ. of Electronic Science and Technology of China (China)
Tao Wan, Univ. of Electronic Science and Technology of China (China)
Yadong Jiang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9686:
8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices
Yadong Jiang; Bernard Kippelen; Junsheng Yu, Editor(s)

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