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Proceedings Paper

Inhomogeneity in layers of dielectric high index materials: a simplified study for an antireflection coating
Author(s): Salvador Bosch
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Paper Abstract

A simple procedure to evidence inhomogeneity in the refractive index of a single dielectric thin film included in a AR coating is developed. It requires only the use of standard measurement equipment: a spectrophotometer and a three wavelength e 1 lipsometer. The results show a good agreement between different characterization methods: reflectance, ellipsometry and single layer spectrophotometric analysis.

Paper Details

Date Published: 1 December 1990
PDF: 9 pages
Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22427
Show Author Affiliations
Salvador Bosch, Univ. de Barcelona (Spain)

Published in SPIE Proceedings Vol. 1324:
Modeling of Optical Thin Films II
Michael Ray Jacobson, Editor(s)

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